Servo Belt Rotary Stage (SBR)
Servo Belt Rotary Stage (SBR)
TECHNICAL SPECIFICATIONS | SBR-50 |
SBR-100 |
SBR-200 |
Type | NEMA 23 3:1 Belt Drive Rotary |
NEMA 23 5:1 Belt Drive Rotary |
NEMA 23 or 34 11:1 Belt Drive Rotary |
Bearing type |
Preloaded duplex angular contact | ||
Motor and Encoder Type |
3-phase brushless motor, with 16KCPR encoder or ring encoder |
||
Through hole |
50.8 mm (2.00 in.) |
101.6 mm (4.00 in.) | 203.2 mm (8.00 in.) |
16KCPR: 90 Ring: 16 |
16KCPR: 75 Ring: 16 |
16KCPR: 60 Ring: 16 |
|
16 |
8 | 8 | |
8 |
8 | 10 | |
Table top parallelism to base (µm TIR)Total indicated worse-case parallelism top to bottom. |
25 |
25 | 35 |
10 |
10 | 15 | |
16KCPR: ±120 arc-sec Ring: Control Dependent, ±1 count possible |
16KCPR: ±40 arc-sec Ring: Control Dependent, ±1 count possible |
16KCPR: ±100 arc-sec Ring: Control Dependent, ±1 count possible |
|
Uni-directional repeatabilityAngular conversion of 10μm at bull gear radius. |
16KCPR: ±30 arc-sec Ring: Control Dependent, ±1 count possible |
16KCPR: ±12 arc-sec Ring: Control Dependent, ±1 count possible |
16KCPR: ±15 arc-sec Ring: Control Dependent, ±1 count possible |
Resolution choices | 16KCPR: 16k @ motor Ring: 1 μm, 0.5 μm, 0.2 μm, 0.1 μm (100 mm ring) |
16KCPR: 16k @ motor Ring: 1 μm, 0.5 μm, 0.2 μm, 0.1 μm (150 mm ring) |
16KCPR: 16k @ motor Ring: 1 μm, 0.5 μm, 0.2 μm, 0.1 μm (255 mm ring) |
Table resolution (KCPR)Measured in thousands of pulses per revolution of the table (KCPR). |
16KCPR: 48 Ring: 314.9, 629.8, 1574, 3149 |
16KCPR: 80 Ring: 472, 944, 236, 4720 |
16KCPR: 176 Ring: 800, 1600, 4000, 8000 |
Speed limit (RPM)Note that maximum speed for ring encoder units decreases as resolution increases. |
16KCPR: 1300 Ring: 1300-134 |
16KCPR: 800 Ring: 764-66 |
16KCPR: 360 Ring: 374-52 |
2.4(-2), 3(-3), 4.0(-4) |
4.1(-2), 5.1(-3), 6.6(-4) | NEMA 23: 9.0(-2), 11.2(-3), 14.5(-4) NEMA 34: 20(-2), 30(-3), 38(-4) |
|
8.6 / 7.7 |
14.0 / 11.7 | 25/21 | |
Maximum moment (N-m)Moment loads are for L10 rating life of 1 million table revolutions. |
120 |
370 | 1050 |
16KCPR: 0.00018 Ring: 0.00047 |
16KCPR: 0.005 Ring: 0.006 |
16KCPR: 0.037 Ring: 0.046 |
|
Stage weight (kg, less motor) | 1.32 |
3.3 | 7.5 |
10 | 25 | 100 |